Mechanical property measurement apparatus for a freestanding
nanofilm with easy thin film sample making and sample gripping
Client / Market
- Nano material property measurement
Necessity of this Technology
- With tensile test, smaller the material, issues occur with load resolution, sample
making, sample handling, and sample gripping that accurate testing is difficult.
- To use current nano/micro tensile test, the tensile sample needs to be machined
precisely in the freestanding form, but if the thickness is less than 100 nm, it is very
difficult to create a freestanding thin film sample.
- Even a thin film sample is created, the sample breaks or is damaged during
measurement, and it makes measurement very tough.
Technical Differentiation
- It measures mechanical properties such as strength and elasticity of nano scale film.
- As it measures mechanical properties of ultrathin films, which are difficult to
measure with existing tensile testing method, it is an important guideline for
reliability assessment of an electronic product using a metal thin film.
- Mechanical properties of a nano scale Au freestanding sample is measured by floating it in water without damaging the sample.
- To accurately assess the mechanical properties of 50 nm-thick Au film, a special
test system needs to be created to float the freestanding Au thin film sample in air for assessment.
- A jig for testing the floating freestanding thin film is formed with PDMS, and with the
adhesiveness of PDMS, a jig to grip the freestanding Au film is designed for experiment.
Excellence of Technology
- A freestanding nanofilm is floated in liquid to maintain its form, and using a
separately produced jig, the properties of the freestanding nanofilm with less than
100 nm in thickness is measured.
Current Intellectual Property Right Status
PATENT
- Apparatus and Method for Mechanical Property Measurement of Freestanding Nanofilm (KR1388005)
- Apparatus and Method for Property Test of Freestanding Nanofilm (KR1409812)
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