Eco-friendly Energy & Environment Research Division | Korea Institute of Machinery & Materials

Remote Plasma Generator


Division	Eco-friendly Energy & Environment Research Division > Department of Plasma Engineering
Name	Dr. Wooseok Kang
Department	Department of Plasma Engineering
Tel	+82 - 42 - 868 - 7435
E-mail	kang@kimm.re.kr
Attachment	Download 128_Remote_Plasma_Generator.pdf (0.4 KB)

Semiconductor/display equipment company
Material/bio/agriculture/environmental application equipment manufacturer using plasma processing

Existing remote plasma generators rely on the radio frequency (RF) or microwave (MW) power supplies that require matching technology between the plasma reactor and the power. Matching is venerable to load change, and is difficult to operate under high pressure.
In particular, matching technology may limit high-power ICP for large capacity/area treatments.

Enables process that minimizes material damage
Can be applied extensively as a new applied technology in flexible device/display and bio fields
Can be applied for various operating areas
Effective process by controlling the plasma characteristics
Neutral particle and low energy ion treatment: Effective plasma chemical process/ minimal damage to the vulnerable objects
Can be operated under a broad pressure range due to the capacitively coupled effect of the dielectric substance
Wide operation ranges-less dependent to the operation pressure change
Easy flow velocity/reaction effect/uniformity control with the nozzle type design
Can be operated under high power conditions/large-volume (or surface) treatment

The capacitively coupled type does not require a special matching technology, and depending on the size of dielectric substance support, large capacity and large area plasma treatment can be conducted easily.
The operating range is wide from few mTorr to few Torr, and depending on the slope angle of the slope on the nozzle part, the electric field and flow velocity change rate can be adjusted to easily control the process parameters.